Synthesis and characterization of single and multilayer boron nitride and boron carbide thin films grown by magnetron sputtering of boron carbide

Author： Guruz M.U.   Dravid V.P.   Chung Y.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.414, Iss.1, 2002-07, pp. : 129-135

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