Selectively grown vertical Si MOS transistor with reduced overlap capacitances

Author: Klaes D.   Moers J.   Tonnesmann A.   Wickenhauser S.   Vescan L.   Marso M.   Grabolla T.   Grimm M.   Luth H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 306-308

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Abstract