Single shot excimer laser crystallization and LPCVD silicon TFTs

Author: Helen Y.   Mourgues K.   Raoult F.   Mohammed-Brahim T.   Bonnaud O.   Rogel R.   Prochasson S.   Boher P.   Zahorski D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 133-136

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract