Surface melt dynamics and super lateral growth regime in long pulse duration excimer laser crystallization of amorphous Si films

Author: Fogarassy E.   de Unamuno S.   Legagneux P.   Plais F.   Pribat D.   Godard B.   Stehle M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 143-147

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Abstract