Lateral growth control in excimer laser crystallized polysilicon

Author: Mariucci L.   Carluccio R.   Pecora A.   Foglietti V.   Fortunato G.   Legagneux P.   Pribat D.   Della Sala D.   Stoemenos J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 137-142

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Abstract