Al-based sputter-deposited films for large liquid-crystal-display

Author: Takatsuji H.   Arai T.   Tsuji S.   Kuroda K.   Saka H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 235-239

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Abstract