Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Author: Yoon S.F.   Rusli   Ahn J.   Zhang Q.   Yang C.Y.   Yang H.   Watt F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.340, Iss.1, 1999-02, pp. : 62-67

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Abstract