Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

By Yoon S.F.   Rusli   Ahn J.   Zhang Q.   Yang C.Y.   Yang H.   Watt F.  

Thin Solid Films, Vol. 340, Iss. 1, 1999-02 ,pp. : 62-67

Elsevier

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cBN Films grown by hot filament assisted microwave electron cyclotron resonance CVD

By Zhang S.J.   Chen G.H.   Deng J.X.   Zhang D.X.   Ren W.   Wang B.   Yan H.  

Vacuum, Vol. 66, Iss. 1, 2002-06 ,pp. : 65-70

Elsevier

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Application of electron cyclotron resonance chemical vapour deposition in the preparation of hydrogenated boron-doped SiC films

By Yoon S. F.   Ahn J.  

Philosophical Magazine B, Vol. 77, Iss. 1, 1998-01 ,pp. : 197-206

Taylor & Francis Ltd

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The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method

By Yoon S.F.   Ji R.   Ahn J.   Milne W.I.  

Thin Solid Films, Vol. 288, Iss. 1, 1996-11 ,pp. : 155-159

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Preparation of c-BN films by RF sputtering and the relation of BN phase formation to the substrate bias and temperature

By Wang B.   Zhao Y.N.   Yu S.   He Z.   Li D.M.   Tao Y.C.   Zou G.T.  

Thin Solid Films, Vol. 320, Iss. 2, 1998-05 ,pp. : 220-222

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