Ion beam sputtering of SnO 2 with low energy oxygen ion beams

Author: Choe Y.-S.   Chung J.-H.   Kim D.-S.   Baik H.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 230-233

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