Low temperature deposition of TiO 2 films with high refractive indices by oxygen-radical beam-assisted evaporation combined with ion beam

Author： Yamada Y. Uyama H. Murata T. Nozoye H.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 347-352

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