Author： Lee S. Hong J. Oh S.G.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 37-41
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Ellipsometry and transport studies of thin-film metal nitrides
By Humlcek J. Nebojsa A. Hora J. Strasky M. Spousta J. Sikola T.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :
Access to resources
Recommend
In situ X-ray investigations of thin film growth
By Baranov A.M. Mikhailov I.F.
Thin Solid Films, Vol. 324, Iss. 1, 1998-07 ,pp. :
By Xu J. Bhushan B.
Wear, Vol. 219, Iss. 1, 1998-08 ,pp. :
Low-temperature thin-film silicon MEMS
By Conde J.P. Gaspar J. Chu V.
Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. :