Ellipsometry and transport studies of thin-film metal nitrides

Author： Humlcek J.   Nebojsa A.   Hora J.   Strasky M.   Spousta J.   Sikola T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 25-29

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