Parameters measurement of ECR C 4 F 8 /Ar plasma

Author: Shindo M.   Hiejima S.   Ueda Y.   Kawakami S.   Ishii N.   Kawai Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 130-133

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Abstract