Plasma-induced free radicals of polycrystalline carbohydrates as spin probe for plasma diagnosis of plasma treatment

Author: Kuzuya M.   Ito K.   Kondo S.-i.   Yamauchi Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 85-89

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Abstract