Negative tone hybrid sol-gel material for electron-beam lithography

Author: Rantala J.T.   Penner R.S.   Honkanen S.   Vahakangas J.   Fallahi M.   Peyghambarian N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.2, 1999-05, pp. : 185-187

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Abstract