Raman characteristics of hard carbon-nitride films deposited by reactive ionized cluster beam techniques

Author: Zou X.R.   Lu H.W.   Xie J.Q.   Feng J.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.2, 1999-05, pp. : 208-211

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Abstract