Correlation between hardness and structure of carbon-nitride thin films obtained by reactive pulsed laser deposition

Author: Gyorgy E.   Nelea V.   Mihailescu I.N.   Perrone A.   Pelletier H.   Cornet A.   Ganatsios S.   Werckmann J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 93-100

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Abstract