Spin-on-glass thin films prepared from a novel polysilsesquioxane by thermal and ultraviolet-irradiation methods

Author: Pan Q.   Gonzalez G.B.   Composto R.J.   Wallace W.E.   Arkles B.   Figge L.K.   Berry D.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.2, 1999-05, pp. : 244-254

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract