Thin CNx films prepared by vacuum rapid thermal annealing

Author： Beshkov G.   Dimitrov D.B.   Georgiev S.   Petrov P.   Zambov L.   Ivanov B.   Popov C.   Georgiev M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.2, 1998-10, pp. : 169-172

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