Effects of carrier film physical properties on W CMP

Author： Wang D.   Zutshi A.   Bibby T.   Beaudoin S.P.   Cale T.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.345, Iss.2, 1999-05, pp. : 278-283

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

By  

PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol. 12, Iss. 10, 2015-10 ,pp. : 1174-1185

John Wiley & Sons Inc

Access to resources Recommend Favorite

The Effects of Hydrogen on the Physical Properties of Palladium

By Goltsov V. A.  

Platinum Metals Review, Vol. 43, Iss. 3, 1999-07 ,pp. : 116-118

Johnson Matthey

Access to resources Recommend Favorite

Effects of Soil Physical Properties to the Corrosion of Underground Pipelines

By  

Materials Science Forum, Vol. 2016, Iss. 840, 2016-02 ,pp. : 309-314

Trans Tech Publications

Access to resources Recommend Favorite

Effects of CdS substrates on the physical properties of polycrystalline CdTe Films

By Lee Y.H.   Lee W.J.   Kwon Y.S.   Yeom G.Y.   Yoon J.K.  

Thin Solid Films, Vol. 341, Iss. 1, 1999-03 ,pp. : 172-175

Elsevier

Access to resources Recommend Favorite

Surface condition effects of the inter-metal dielectrics on interconnect aluminum film properties

By Kim S.-D.   Rhee J.-K.   Hwang I.-S.   Park H.-M.   Park H.-C.  

Thin Solid Films, Vol. 401, Iss. 1, 2001-12 ,pp. : 273-278

Elsevier

Access to resources Recommend Favorite