Effects of substrate temperature on the properties of tetrahedral amorphous carbon films

Author: Tay B.K.   Shi X.   Liu E.J.   Cheah L.K.   Tan H.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.346, Iss.1, 1999-06, pp. : 155-161

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Abstract