Effect of phosphorus content on structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Author: Han J.C.   Liu A.P.   Zhu J.Q.   Tan M.L.   Wu H.P.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.88, Iss.2, 2007-08, pp. : 341-345

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