Internal stress and adhesion of thin films sputtered onto glass by an in-line sputtering system

Author: Suzuki S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.351, Iss.1, 1999-08, pp. : 194-197

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract