Effect of chemical sputtering on the growth and structural evolution of magnetron sputtered CN x thin films

Author： Hellgren N. Johansson M.P. Broitman E. Sandstrom

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 146-152

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