In situ monitoring of sputtered zinc oxide films for piezoelectric transducers

Author： Zayer N.K.   Greef R.   Rogers K.   Grellier A.J.C.   Pannell C.N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.352, Iss.1, 1999-09, pp. : 179-184

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