Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications

Author: Agashe C.   Kluth O.   Schope G.   Siekmann H.   Hupkes J.   Rech B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 167-172

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Abstract