Deposition of transparent and conducting indium-tin-oxide films by the r.f.-superimposed DC sputtering technology

Author: Bender M.   Trube J.   Stollenwerk J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 100-105

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Abstract