Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films

Author： Ruffner J.A.   Clem P.G.   Tuttle B.A.   Dimos D.   Gonzales D.M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 256-261

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