Reactively DC magnetron sputtered thin AlN films studied by X-ray photoelectron spectroscopy and polarised infrared reflection

Author： Manova D.   Dimitrova V.   Karpuzov D.   Yankov R.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.3, 1999-03, pp. : 301-305

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