Preparation of single phase tungsten carbide by annealing of sputtered tungsten-carbon layers

Author: Romanus H.   Cimalla V.   Schaefer J.A.   Spiesz L.   Ecke G.   Pezoldt J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.359, Iss.2, 2000-01, pp. : 146-149

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Abstract