Tungsten-carbon films prepared by reactive sputtering from argon-benzene discharges

Author: Radic N.   Grzeta B.   Milat O.   Ivkov J.   Stubicar M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.2, 1998-05, pp. : 192-197

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract