Stress, porosity measurements and corrosion behaviour of AlN films deposited on steel substrates

Author: Vacandio F.   Massiani Y.   Gergaud P.   Thomas O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.359, Iss.2, 2000-01, pp. : 221-227

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract