Fine trimming of SmS film resistance by XeCl laser ablation

Author: Miodushevsky P.   Protopapa M.L.   De Tomasi F.   Perrone M.R.   Tundo S.   Vasanelli L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.359, Iss.2, 2000-01, pp. : 251-254

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Abstract