The preparation of single-crystal 4H-SiC film by pulsed XeCl laser deposition

Author： Wang Y.   Wen J.   Guo Z.   Tang Y.   Tang H.   Wu J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 93-99

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