Infra-red reflectivity of ion-implanted and pulsed excimer laser irradiated 4H-SiC

Author: Key P.H.   Sands D.   Schlaf M.   Walton C.D.   Anthony C.J.   Brunson K.M.   Uren M.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 200-203

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Abstract