Synthesis of SiGeC layers by ion implantation of Ge and C

Author: Kurata H.   Ohfuti M.   Futatsugi T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 217-221

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract