Chemical vapour deposition of molybdenum carbides: aspects of phase stability

Author: Lu J.   Hugosson H.   Eriksson O.   Nordstrom L.   Jansson U.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 203-212

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Abstract