Ultrathin Ta 2 O 5 films produced by large-area pulsed laser deposition

Author: Boughaba S.   Islam M.   McCaffrey J.P.   Sproule G.I.   Graham M.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 119-125

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Abstract