Formation of hillocks in Pt/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering

Author: Nam H.-J.   Choi D.-K.   Lee W.-J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 264-271

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Abstract