Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering

Author： Mansano R.D. Massi M. Zambom L.S. Verdonck P. Nogueira P.M. Maciel H.S. Otani C.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 243-246

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