Influence of nitrogen incorporation on the electrical properties of MPCVD diamond films growth in CH 4 -CO 2 -N 2 and CH 4 -H 2 -N 2 gas mixtures

Author： Elmazria O. Bougdira J. Chatei H. De Pouques L. Remy M. Alnot P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.374, Iss.1, 2000-10, pp. : 27-33

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