IR characterization of a-C:H:N films sputtered in Ar/CH 4 /N 2 plasma

Author: Lazar G.   Lazar I.  

Publisher: Elsevier

ISSN: 0022-3093

Source: Journal of Non-Crystalline Solids, Vol.331, Iss.1, 2003-12, pp. : 70-78

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Abstract