Wear resistance of carbon nitride thin films formed by ion beam assisted deposition

Author: Hayashi T.   Matsumuro A.   Muramatsu M.   Kohzaki M.   Yamaguchi K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.376, Iss.1, 2000-11, pp. : 152-158

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Abstract