Oxygen diffusion in silicon oxide films produced by different methods

Author: Perez-Bueno J.J.   Ramrez-Bon R.   Vorobiev Y.V.   Espinoza-Beltran F.   Gonzalez-Hernandez J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.379, Iss.1, 2000-12, pp. : 57-63

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Abstract