Ion beam synthesized silicides: growth, characterization and devices

Author： Homewood K.P. Reeson K.J. Gwilliam R.M. Kewell A.K. Lourenco M.A. Shao G. Chen Y.L. Sharpe J.S. McKinty C.N. Butler T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.381, Iss.2, 2001-01, pp. : 188-193

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