Study of structure and optical properties of -FeSi 2 precipitates formed by ion-implantation of Fe + in Si(100) and effects of co-implantation of Fe + and Si + in amorphous SiO 2

Author： Oyoshi K.   Lenssen D.   Carius R.   Mantl S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.381, Iss.2, 2001-01, pp. : 194-201

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