Formation of -FeSi 2 precipitates at the SiO 2 /Si interface by Fe + ion implantation and their structural and optical properties

Author： Oyoshi K.   Lenssen D.   Carius R.   Mantl S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.381, Iss.2, 2001-01, pp. : 202-208

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