Author： Yaung D.N. Fang Y.K. Huang K.C. Wang Y.J. Hung C.C. Liang M.S. Wuu S.G.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 271-274
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