Optical properties of silicon nanocrystallites in polycrystalline silicon films prepared at low temperature by plasma-enhanced chemical vapor deposition

Author： Milovzorov D.E.   Ali A.M.   Inokuma T.   Kurata Y.   Suzuki T.   Hasegawa S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 47-55

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