Structural properties of AlN films grown on Si, Ru/Si and ZnO/Si substrates

Author: Lim W.T.   Son B.K.   Kang D.H.   Lee C.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 56-60

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Abstract